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蒸着材料 Temperature(℃) at Vapor Pressure (Torr) 適合セル
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10-8 10-6 10-4
Ag 574 685 832 Hot-Lip SUMO
Dual Filament
Al 685 812 972 Cold-Lip SUMO
Cold-Lip Single Filament
As 104 150 204 Valved Cracker
Low Temperature Single Filamentu
Au 807 947 1132 High Temperature
B 1282 1467 1707 High Temperature(for Dopant in Si MBE)
Ba 272 354 462 Low Temperature SUMO
Low Temperature Dual Filament
Low Temperature Single Filament
BaF2 729 840 984 Hot-Lip SUMO
Dual Filament
High Temperature
Be 707 832 997 Dopant Source
Bi 329 409 517 Low Temperature SUMO
Low Temperature Dual Filament
Low Temperature Single Filament
C 1657 1867 2137 Gas - CBr4 Source (Dopant)
Ca 282 357 459 Low Temperature SUMO
Low Temperature Dual Filament
Low Temperature Single Filament
CaF2 817 938 1093 Hot-Lip SUMO
Dual Filament
High Temperature
Cd 74 119 177 Low Temperature Single Filament
Low Temperature SUMO
Low Temperature Dual Filament
Valved Cracker
蒸着材料 Temperature(℃) at Vapor Pressure (Torr) 適合セル
クリックして下さい
10-8 10-6 10-4
CdS 367 448 554 Low Temperature SUMO
(stoichiometry variable) Low Temperature Dual Filament
CdSe 359 439 543 Low Temperature SUMO
Low Temperature Dual Filament
CdTe 290 362 455 Low Temperature SUMO
Valved Cracker
Low Temperature Dual Filament
Co 922 1067 1257 High Temperature
Cr 837 977 1157 High Temperature
Cu 722 852 1027 Hot-Lip SUMO
Dual Filament
High Temperature
Dy 625 747 897 Modified Filament
High Temperature
Er 649 777 947 Modified Filament
High Temperature
Eu 283 361 466 Low Temperature Dual Filament
Fe 858 998 1180 High Temperature
Ga 619 742 907 Hot-Lip SUMO
Dual Filament
Modified Filament
Ge 812 947 1137 Hot-Lip SUMO
Dual Filament
Modified Filament
High Temperature
In 488 597 742 Hot-Lip SUMO
Dual Filament
Modified Filament
K 21 65 123 Low Temperature SUMO
Low Temperature Dual Filament
Low Temperature Single Filament

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