{"id":168,"date":"2021-10-08T18:24:03","date_gmt":"2021-10-08T09:24:03","guid":{"rendered":"http:\/\/rdec.co.jp\/update\/?p=168"},"modified":"2023-08-02T14:37:31","modified_gmt":"2023-08-02T05:37:31","slug":"ksa-ice%e3%80%80mocvd%e7%94%a8in-situ%e3%81%b2%e3%81%9a%e3%81%bf%e3%83%bb%e5%bf%9c%e5%8a%9b%e3%83%bb%e6%b8%a9%e5%ba%a6%e3%83%bb%e5%8f%8d%e5%b0%84%e7%8e%87%e3%83%bb%e8%86%9c%e5%8e%9a%e6%b8%ac%e5%ae%9a","status":"publish","type":"post","link":"https:\/\/rdec.co.jp\/update\/168","title":{"rendered":"MOCVD\u7528in-situ\u3072\u305a\u307f\u30fb\u5fdc\u529b\u30fb\u6e29\u5ea6\u30fb\u53cd\u5c04\u7387\u30fb\u819c\u539a\u6e2c\u5b9a\u30b7\u30b9\u30c6\u30e0\u3000kSA ICE"},"content":{"rendered":"\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full advgb-dyn-9e9fe0a1\"><img loading=\"lazy\" decoding=\"async\" width=\"450\" height=\"320\" src=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/main_2.jpg\" alt=\"\" class=\"wp-image-1021\" srcset=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/main_2.jpg 450w, https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/main_2-300x213.jpg 300w\" sizes=\"auto, (max-width: 450px) 100vw, 450px\" \/><figcaption class=\"wp-element-caption\">iCE\u30bb\u30c3\u30c8\u30a2\u30c3\u30d7<\/figcaption><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/main_1.jpg\" alt=\"\" class=\"wp-image-1019\" width=\"396\" height=\"284\"\/><\/figure>\n<\/div>\n<\/div>\n\n\n\n<h4 class=\"wp-block-heading advgb-dyn-f4f5d08d\">\u88fd\u54c1\u60c5\u5831<\/h4>\n\n\n\n<h5 class=\"wp-block-heading advgb-dyn-a74e6709\">\u6982\u8981<\/h5>\n\n\n\n<p>GaN(LED\u3001\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9)\u306eMOCVD\u6210\u819c\u4e2d\u306ein-situ\u6e2c\u5b9a\u306b\u7279\u5316\u3057\u305f\u88fd\u54c1\u3067\u3059\u3002<br>\u5fc5\u8981\u6a5f\u80fd\u306b\u5fdc\u3058\u3066\u4ee5\u4e0b\u304b\u3089\u9078\u629e\u3067\u304d\u3001\u5f8c\u306b\u30a2\u30c3\u30d7\u30b0\u30ec\u30fc\u30c9\u3059\u308b\u3053\u3068\u3082\u53ef\u80fd\u3067\u3059\u3002<\/p>\n\n\n\n<table class=\"wp-block-advgb-table advgb-table-frontend\" style=\"border-collapse:collapse\"><tbody><tr><td style=\"background-color:#ececec;text-align:left\"><strong>kSA ICE<\/strong><\/td><td style=\"text-align:center\">\u53cd\u5c04\u7387\u30fb\u9ed2\u4f53\u8f3b\u5c04\u6e29\u5ea6\u30fb\u3072\u305a\u307f\u30fb\u5fdc\u529b<\/td><\/tr><tr><td style=\"background-color:#ececec;text-align:left\"><strong>kSA ICE-R<\/strong><\/td><td style=\"text-align:center\">\u53cd\u5c04\u7387<\/td><\/tr><tr><td style=\"background-color:#ececec;text-align:left\"><strong>kSA ICE-RB<\/strong><\/td><td style=\"text-align:center\">\u53cd\u5c04\u7387\u30fb\u9ed2\u4f53\u8f3b\u5c04\u6e29\u5ea6<\/td><\/tr><tr><td style=\"background-color:#ececec;text-align:left\"><strong>kSA ICE-RC<\/strong><\/td><td style=\"text-align:center\">\u53cd\u5c04\u7387\u30fb\u3072\u305a\u307f\u30fb\u5fdc\u529b<\/td><\/tr><tr><td style=\"background-color:#ececec;text-align:left\"><strong>kSA Blue ICE<\/strong><\/td><td style=\"text-align:center\">\u53cd\u5c04\u7387\u30fb\u9ed2\u4f53\u8f3b\u5c04\u6e29\u5ea6\u30fb\u3072\u305a\u307f\u30fb\u5fdc\u529b\u30fbGaN\u8584\u819c\u8868\u9762\u6e29\u5ea6\u30fb\u819c\u539a\u30fb\u7c97\u5ea6<\/td><\/tr><\/tbody><\/table>\n\n\n\n<h6 class=\"wp-block-heading advgb-dyn-55f54fdb\">STANDARD HARDWARE LAYOUT<\/h6>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-vertically-aligned-top is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/main_3.jpg\" alt=\"\" class=\"wp-image-1022\" width=\"404\" height=\"507\" srcset=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/main_3.jpg 278w, https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/main_3-238x300.jpg 238w\" sizes=\"auto, (max-width: 404px) 100vw, 404px\" \/><\/figure>\n<\/div>\n<\/div>\n\n\n\n<h6 class=\"wp-block-heading advgb-dyn-aaad8247\">\u30de\u30eb\u30c1\u30a6\u30a7\u30cf\u6e2c\u5b9a<\/h6>\n\n\n\n<p>\u30fb\u30de\u30eb\u30c1\u30a6\u30a7\u30cf\u6e2c\u5b9a\u6a5f\u80fd\u306f\u6a19\u6e96\u3067\u3059\u304c\u3001\u30b7\u30f3\u30b0\u30eb\u30a6\u30a7\u30cf\u6e2c\u5b9a\u306e\u307f\u3078\u306e\u30c0\u30a6\u30f3\u30b0\u30ec\u30fc\u30c9\u3082\u53ef\u80fd\u3067\u3059\u3002<br>\u30fbExcel\u3084\u753b\u50cf\u30d5\u30a1\u30a4\u30eb(tiff\u3001bmp\u7b49)\u306e\u51fa\u529b\u3082\u7c21\u5358\u306b\u884c\u3048\u307e\u3059\u3002<\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full is-resized advgb-dyn-ebf85635\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/main_4.jpg\" alt=\"\" class=\"wp-image-1023\" width=\"409\" height=\"249\" srcset=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/main_4.jpg 426w, https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/main_4-300x183.jpg 300w\" sizes=\"auto, (max-width: 409px) 100vw, 409px\" \/><figcaption class=\"wp-element-caption\">\u6e2c\u5b9a\u753b\u9762\u4f8b1<\/figcaption><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-vertically-aligned-top is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full advgb-dyn-4518488a\"><img loading=\"lazy\" decoding=\"async\" width=\"325\" height=\"260\" src=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/main_5.jpg\" alt=\"\" class=\"wp-image-1024\" srcset=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/main_5.jpg 325w, https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/main_5-300x240.jpg 300w\" sizes=\"auto, (max-width: 325px) 100vw, 325px\" \/><figcaption class=\"wp-element-caption\">\u6e2c\u5b9a\u753b\u9762\u4f8b2<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n<h4 class=\"wp-block-heading advgb-dyn-db407f02\" id=\"content02\"><strong>kSA mini-MOS<\/strong><\/h4>\n\n\n\n<h5 class=\"wp-block-heading advgb-dyn-f329ecf7\"><strong>\u6982\u8981<\/strong><\/h5>\n\n\n\n<p>\u30a8\u30bf\u30ed\u30f3\u306b\u3088\u308b\u5e73\u884c\u914d\u5217\u30de\u30eb\u30c1\u30ec\u30fc\u30b6\u30fc\u30d3\u30fc\u30e0\uff08\u7279\u8a31\uff09\u306b\u3088\u308b\u30b5\u30f3\u30d7\u30eb\u7167\u5c04\u3001CCD\u30ab\u30e1\u30e9\u306b\u3088\u308b\u30d3\u30fc\u30e0\u4f4d\u7f6e\u306e\u691c\u51fa\u3001<br>\u53d6\u5f97\u753b\u50cf\u306e\u30d3\u30fc\u30e0\u30b9\u30dd\u30c3\u30c8\u9593\u8ddd\u96e2\u5909\u5316\u3092\u898b\u3066\u3001\u8584\u819c\u306b\u304b\u304b\u308b\u6b6a\u307f\u3001\u5fdc\u529b\u3092\u6e2c\u5b9a\u3057\u307e\u3059\u3002<br>CVD\u3001MOCVD\u3001\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e\u3001MBE\u88c5\u7f6e\u306e\u57fa\u677f\u306b\u5bfe\u5fdc\u3057\u3066\u3044\u307e\u3059\u3002\u7814\u7a76\u30fb\u958b\u767a\u306e\u307f\u306a\u3089\u305a\u3001\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u3082\u8584\u819c\u4f5c\u6210\u904e\u7a0b\u306e\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u30e2\u30cb\u30bf\u30b7\u30b9\u30c6\u30e0\u3068\u3057\u3066\u4f7f\u7528\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<h5 class=\"wp-block-heading advgb-dyn-a85fd84e\"><strong>\u7279\u9577<\/strong><\/h5>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uff12\u3064\u306e\u30a8\u30bf\u30ed\u30f3\u306b\u3088\u308b\u9ad8\u89e3\u50cf\u5ea62D\u30de\u30eb\u30c1\u30d3\u30fc\u30e0\u5149\u5b66\u7cfb\u30bb\u30f3\u30b5\u30fc\u30af\u30ce\u30ed\u30b8\u30fc\uff08\u7279\u8a31\uff09\u306b\u3088\u308a\uff58\u3001\uff59\u65b9\u5411\u306e\u3072\u305a\u307f\u3092\u6e2c\u5b9a<\/li>\n\n\n\n<li>\u53cd\u5c04\u30ec\u30fc\u30b6\u30fc\u5f37\u5ea6\u632f\u52d5\u306b\u3088\u308b\u8584\u819c\u539a\u30fb\u6210\u9577\u7387\u30fb\u5149\u5b66\u5b9a\u6570\u306e\u7cbe\u5bc6\u6e2c\u5b9a\u304c\u53ef\u80fd<\/li>\n\n\n\n<li>\u30ec\u30fc\u30b6\u30fc\u30b9\u30dd\u30c3\u30c8\u306e\u540c\u6642\u691c\u51fa\u306b\u3088\u308a\u3001\u57fa\u677f\u56de\u8ee2\u306a\u3069\u306e\u632f\u52d5\u306e\u5f71\u97ff\u306f\u307b\u3068\u3093\u3069\u53d7\u3051\u305a\u306b\u6e2c\u5b9a<\/li>\n\n\n\n<li>\u66f2\u7387\u534a\u5f84\uff14\uff5e\uff11\uff10km\uff08\u88c5\u7f6e\u306e\u4ed5\u69d8\u306b\u4f9d\u308b\uff09\u307e\u3067\u306e\u3072\u305a\u307f\u6e2c\u5b9a\u304c\u53ef\u80fd<\/li>\n\n\n\n<li>\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u306a\u30ab\u30b9\u30bf\u30e0\u30de\u30a6\u30f3\u30c8\u30c7\u30b6\u30a4\u30f3\u3092\u63d0\u4f9b<\/li>\n\n\n\n<li>\u5916\u90e8\u30c8\u30ea\u30ac\u6a5f\u80fd\u306b\u3088\u308a\u56de\u8ee2\u57fa\u677f\u306b\u3082\u5bfe\u5fdc<\/li>\n<\/ul>\n\n\n\n<h5 class=\"wp-block-heading advgb-dyn-206cd861\"><strong>\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/strong><\/h5>\n\n\n\n<ol class=\"wp-block-list\">\n<li>.\u4f4e\u6e29GaN\u30d0\u30c3\u30d5\u30a1\u30ec\u30a4\u30e4\u30fc\u4e0a\u306e\u9ad8\u6e29GaN\u819c\u6210\u9577\u6642\u306e\u5fdc\u529b\u30fb\u819c\u539a\u3092\u30e2\u30cb\u30bf\u30fc\u53ef\u80fd\uff08\u57fa\u677f\u56de\u8ee2\u30b9\u30d4\u30fc\u30c91200rpm\u306b\u3082\u5bfe\u5fdc\uff09\u53cd\u5c04\u30ec\u30fc\u30b6\u30fc\u5f37\u5ea6\u632f\u52d5\u306f\u6b63\u78ba\u306a\u819c\u539a\u6e2c\u5b9a\u3092\u63d0\u4f9b<\/li>\n\n\n\n<li> MOS\u306e\u53cd\u5c04\u30ec\u30fc\u30b6\u30fc\u5f37\u5ea6\u632f\u52d5\u306f\u3001\u4f8b\u3048\u3070\u539a\u3044DLC\u8584\u819c\u306e\u5c64\u6210\u9577\u30e2\u30cb\u30bf\u30fc\u306b\u5fdc\u7528\u53ef\u80fd\u632f\u52d5\u306f\u6b63\u78ba\u306a\u5149\u5b66\u5b9a\u6570\u3001\u500b\u3005\u306e\u30ec\u30a4\u30e4\u30fc\u8584\u819c\u819c\u539a\u3092\u7b97\u51fa<\/li>\n<\/ol>\n\n\n\n<h5 class=\"wp-block-heading advgb-dyn-f10795d2\"><strong>\u69cb\u6210<\/strong><\/h5>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u611f\u5ea68bit CCD<\/li>\n\n\n\n<li>\u96c6\u7a4d\u30ec\u30fc\u30b6\u30fc\u5149\u5b66\u7cfb<\/li>\n\n\n\n<li>\u30b5\u30fc\u30dc\u5236\u5fa1\u5149\u5b66\u30df\u30e9\u30fc<\/li>\n\n\n\n<li>Dell \u30c7\u30b9\u30af\u30c8\u30c3\u30d7PC \u53c8\u306f \u30e9\u30c3\u30af\u30de\u30a6\u30f3\u30c8\u30b3\u30f3\u30d4\u30e5\u30fc\u30bf<\/li>\n\n\n\n<li>\u5236\u5fa1\u30dc\u30fc\u30c9(Scientific Grade Frame Digitization Board, Multifunction Digital and Analog I\/O board, Servo Control Board)<\/li>\n<\/ul>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<p><a href=\"https:\/\/www.veeco.com\/\" target=\"_blank\" rel=\"noreferrer noopener\">Veeco D180<\/a><strong>&nbsp;(GaN MOCVD system) \u306b<\/strong><br><strong>\u30de\u30a6\u30f3\u30c8\u3055\u308c\u305fkSA mini-MOS<\/strong><\/p>\n\n\n\n<figure class=\"wp-block-image size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/mocvd-mos.jpg\" alt=\"\" class=\"wp-image-1041\" width=\"413\" height=\"314\" srcset=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/mocvd-mos.jpg 500w, https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/mocvd-mos-300x228.jpg 300w\" sizes=\"auto, (max-width: 413px) 100vw, 413px\" \/><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<p><strong>mini-MOS \u6e2c\u5b9a\u4ed5\u7d44\u307f<\/strong><\/p>\n\n\n\n<p><\/p>\n\n\n\n<figure class=\"wp-block-image size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/mocvd-mos2.jpg\" alt=\"\" class=\"wp-image-1043\" width=\"383\" height=\"289\" srcset=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/mocvd-mos2.jpg 500w, https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/mocvd-mos2-300x226.jpg 300w\" sizes=\"auto, (max-width: 383px) 100vw, 383px\" \/><\/figure>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<p><strong>mini MOS\u3072\u305a\u307f\u6e2c\u5b9a\u4f8b<\/strong><\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"497\" height=\"345\" src=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/mocvd-mos3.jpg\" alt=\"\" class=\"wp-image-1042\" srcset=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/mocvd-mos3.jpg 497w, https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/mocvd-mos3-300x208.jpg 300w\" sizes=\"auto, (max-width: 497px) 100vw, 497px\" \/><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<p><strong>mini MOS\u3072\u305a\u307f\uff06\u53cd\u5c04\u7387\u6e2c\u5b9a\u4f8b<\/strong><\/p>\n\n\n\n<figure class=\"wp-block-image size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/mocvd-mos6.jpg\" alt=\"\" class=\"wp-image-1044\" width=\"380\" height=\"278\" srcset=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/mocvd-mos6.jpg 545w, https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/mocvd-mos6-300x220.jpg 300w\" sizes=\"auto, (max-width: 380px) 100vw, 380px\" \/><\/figure>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<p><strong>mini MOS\u5fdc\u529b\u6e2c\u5b9a\u4f8b<\/strong><\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"414\" height=\"345\" src=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/mocvd-mos4.jpg\" alt=\"\" class=\"wp-image-1045\" srcset=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/mocvd-mos4.jpg 414w, https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/mocvd-mos4-300x250.jpg 300w\" sizes=\"auto, (max-width: 414px) 100vw, 414px\" \/><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\"><\/div>\n<\/div>\n\n\n\n<h6 class=\"wp-block-heading advgb-dyn-9fe903ca\"><strong>In-situ \u3072\u305a\u307f\u30fb\u5fdc\u529b\u6e2c\u5b9a\u30b7\u30b9\u30c6\u30e0\u3000\u6a5f\u80fd\u6bd4\u8f03\u8868<\/strong><\/h6>\n\n\n\n<table class=\"wp-block-advgb-table advgb-table-frontend\" style=\"border-collapse:collapse;table-layout:fixed\"><tbody><tr><td style=\"background-color:#def5ec\">\u512a\u308c\u3066\u3044\u308b<\/td><td style=\"background-color:#fff5d9\">\u666e\u901a<\/td><td style=\"background-color:#ffd7df\">\u52a3\u3063\u3066\u3044\u308b<\/td><\/tr><\/tbody><\/table>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:100%\">\n<div class=\"wp-block-group advgb-dyn-f2a6aa86\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<table class=\"wp-block-advgb-table advgb-table-frontend\" style=\"border-collapse:collapse;table-layout:fixed\"><tbody><tr><td><\/td><td>2D\u5e73\u884c\u914d\u5217\u30d3\u30fc\u30e0\u30b9\u30dd\u30c3\u30c8<br><strong>(kSA MOS, since 2001)<\/strong><\/td><td>2\u30b9\u30dd\u30c3\u30c8<br><strong>(L\u793e)<\/strong><\/td><td>1\u30b9\u30dd\u30c3\u30c8<br><strong>(\u30c7\u30a3\u30d5\u30ec\u30af\u30c8\u30e1\u30fc\u30bf)<\/strong><\/td><\/tr><tr><td>\u5206\u89e3\u80fd\u3001<br>\u518d\u73fe\u6027\u3001<br>\u611f\u5ea6<\/td><td style=\"background-color:#def5ec\">2D\u5e73\u884c\u914d\u5217\u30d3\u30fc\u30e0\u30b9\u30dd\u30c3\u30c8(\u7279\u8a31)\u306e\u5168\u30b9\u30dd\u30c3\u30c8\u9593\u6e2c\u5b9a\u306b\u3088\u308a\u3001\u5f93\u6765\u88fd\u54c1\u306e10\u500d\u4ee5\u4e0a\u306e\u6e2c\u5b9a\u518d\u73fe\u6027&amp;\u5206\u89e3\u80fd\u3092\u5b9f\u73fe<\/td><td style=\"background-color:#fff5d9\">\u9ad8\u5206\u89e3\u80fd\u3092\u5f97\u308b\u306b\u306f2\u30b9\u30dd\u30c3\u30c8\u3092\u5927\u304d\u306a\u8ddd\u96e2\u3092\u958b\u3051\u3066\u914d\u7f6e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002<br>\u4e00\u5b9a\u306e\u3072\u305a\u307f\u6e2c\u5b9a\u306e\u307f\u53ef\u80fd\u3001\u9ad8\u5206\u89e3\u80fd\u30b7\u30b9\u30c6\u30e0\u306b\u306f\u8ffd\u52a0\u5149\u5b66\u7cfb\u304c\u5fc5\u8981\u3068\u306a\u308a\u3001\u30ec\u30fc\u30b6\u30fc\u30b9\u30dd\u30c3\u30c8\u9593\u306e\u30b7\u30b0\u30ca\u30eb\u691c\u77e5\u306b\u5f71\u97ff\u3092\u53ca\u307c\u3059\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002<\/td><td style=\"background-color:#ffd7df\">\u5149\u5b66\u7cfb\u3068\u30c7\u30a3\u30c6\u30af\u30bf\u304c\u7d71\u5408\u3055\u308c\u3066\u3044\u306a\u3044\u305f\u3081\u3001\u7c97\u3044\u3072\u305a\u307f\u6e2c\u5b9a\u3057\u304b\u3067\u304d\u306a\u3044<\/td><\/tr><tr><td>\u7cbe\u5ea6<\/td><td style=\"background-color:#def5ec\">\u6821\u6b63\u7528\u306b\u30d5\u30e9\u30c3\u30c8\u30df\u30e9\u30fc\u53ca\u3073\u66f2\u7387\u534a\u5f84\u306e\u5206\u304b\u3063\u3066\u3044\u308b\u30b5\u30f3\u30d7\u30eb\u304c\u4ed8\u5c5e<\/td><td style=\"background-color:#fff5d9\">\u6821\u6b63\u65b9\u6cd5\u4e0d\u660e<\/td><td style=\"background-color:#fff5d9\">\u6821\u6b63\u65b9\u6cd5\u4e0d\u660e<\/td><\/tr><tr><td>\u5bfe&#8221;\u632f\u52d5&#8221;<\/td><td style=\"background-color:#def5ec\"><br>\u8907\u6570(\u6700\u5c0f4\u500b)\u306e\u30b9\u30dd\u30c3\u30c8\u3092\u4f7f\u3044\u305d\u306e\u5e73\u5747\u5024\u3092\u6e2c\u5b9a\u3067\u304d\u308b\u305f\u3081\u3001\u632f\u52d5\u306b\u975e\u5e38\u306b\u6709\u52b9\u30fb\u30d3\u30fc\u30e0\u306f1\u3064\u306e\u5149\u5b66\u7cfb\u304b\u3089\u30a8\u30bf\u30ed\u30f3(\u7279\u8a31)\u3092\u901a\u3057\u3066\u5206\u5272\u30012\u6b21\u5143\u914d\u5217\u5e73\u884c\u30d3\u30fc\u30e0\u306e\u5e73\u884c\u3082\u4fdd\u8a3c<\/td><td style=\"background-color:#fff5d9\">2\u30b9\u30dd\u30c3\u30c8\u306e\u307f\u4f7f\u7528\uff1a\u9ad8\u5206\u89e3\u80fd\u30b7\u30b9\u30c6\u30e0\u306b\u306f\u8ffd\u52a0\u5149\u5b66\u7cfb\u304c\u5fc5\u8981\u3068\u306a\u308a\u3001\u30ec\u30fc\u30b6\u30fc\u30b9\u30dd\u30c3\u30c8\u9593\u306e\u30b7\u30b0\u30ca\u30eb\u691c\u77e5\u306b\u5f71\u97ff\u3092\u53ca\u307c\u3059\u53ef\u80fd\u6027\u304c\u3042\u308b<\/td><td style=\"background-color:#ffd7df\">\u5149\u5b66\u7cfb\u3068\u30c7\u30a3\u30c6\u30af\u30bf\u304c\u7d71\u5408\u3055\u308c\u3066\u3044\u306a\u3044\u305f\u3081\u3001\u7c97\u3044\u3072\u305a\u307f\u6e2c\u5b9a\u3057\u304b\u3067\u304d\u306a\u3044<\/td><\/tr><tr><td><br>\u6e2c\u5b9a\u5024\u306e\u3076\u308c<br><\/td><td style=\"background-color:#def5ec\">\u5149\u5b66\u7cfb\u3068\u30ec\u30fc\u30b6\u30fc\u30e2\u30b8\u30e5\u30fc\u30eb\u306f\u5f37\u56fa\u306b\u56fa\u5b9a\u3055\u308c\u3001\u6e29\u5ea6\u3082\u4e00\u5b9a\u306b\u4fdd\u6301<\/td><td style=\"background-color:#fff5d9\">\u9ad8\u5206\u89e3\u80fd\u30b7\u30b9\u30c6\u30e0\u306b\u306f\u8ffd\u52a0\u5149\u5b66\u7cfb\u304c\u5fc5\u8981\u3068\u306a\u308a\u3001\u30ec\u30fc\u30b6\u30fc\u30b9\u30dd\u30c3\u30c8\u9593\u306e\u30b7\u30b0\u30ca\u30eb\u691c\u77e5\u306b\u5f71\u97ff\u3092\u53ca\u307c\u3059\u53ef\u80fd\u6027\u304c\u3042\u308b<\/td><td style=\"background-color:#ffd7df\">\u5149\u5b66\u7cfb\u3068\u30c7\u30a3\u30c6\u30af\u30bf\u304c\u7d71\u5408\u3055\u308c\u3066\u3044\u306a\u3044\u305f\u3081\u3001\u7c97\u3044\u3072\u305a\u307f\u6e2c\u5b9a\u3057\u304b\u3067\u304d\u306a\u3044<\/td><\/tr><tr><td>2D\u7a7a\u9593\u5206\u89e3\u80fd\u3001x, y<\/td><td style=\"background-color:#def5ec\">2D\u914d\u5217\u5e73\u884c\u30d3\u30fc\u30e0\u30b9\u30dd\u30c3\u30c8(\u7279\u8a31)\u306b\u3088\u308bx\u65b9\u5411&amp;y\u65b9\u5411\u306e\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u3072\u305a\u307f\u30fb\u5fdc\u529b\u6e2c\u5b9a\u304c\u53ef\u80fd\u3002<\/td><td style=\"background-color:#ffd7df\">\u6a5f\u80fd\u306a\u3057 (1D\u306e\u307f)<\/td><td style=\"background-color:#ffd7df\">\u306a\u3057<\/td><\/tr><tr><td>\u5927\u304d\u3044\u3072\u305a\u307f\u5909\u5316 \u53c8\u306fW, D, 300mm\u4ee5\u4e0a\u306b \u304a\u3051\u308b\u30b5\u30f3\u30d7\u30eb\u632f\u52d5<\/td><td style=\"background-color:#def5ec\">\u30aa\u30fc\u30c8\u30df\u30e9\u30fc\u5236\u5fa1(\u7279\u8a31)\u306b\u3088\u308a\u3001\u30d3\u30fc\u30e0\u30b9\u30dd\u30c3\u30c8\u304a\u6349\u3048\u7d9a\u3051\u308b(\u81ea\u52d5\u8ffd\u5c3e)<\/td><td style=\"background-color:#fff5d9\">\u30b9\u30dd\u30c3\u30c8\u304c\u30c7\u30a3\u30c6\u30af\u30bf\u306e\u691c\u77e5\u7bc4\u56f2\u304b\u3089\u5916\u308c\u3084\u3059\u3044\u3002<br>\u3088\u308a\u5927\u304d\u3044\u30ec\u30f3\u30ba\u306b\u4ea4\u63db\u3057\u305f\u5834\u5408\uff1a\u5149\u8def\u304c\u305a\u308c\u3066\u3057\u307e\u3044\u6e2c\u5b9a\u8aa4\u5dee\u3092\u751f\u3080<\/td><td style=\"background-color:#fff5d9\">\u30b9\u30dd\u30c3\u30c8\u304c\u30c7\u30a3\u30c6\u30af\u30bf\u306e\u691c\u77e5\u7bc4\u56f2\u304b\u3089\u5916\u308c\u3084\u3059\u3044\u3002<br>\u3088\u308a\u5927\u304d\u3044\u30ec\u30f3\u30ba\u306b\u4ea4\u63db\u3057\u305f\u5834\u5408\uff1a\u5149\u8def\u304c\u305a\u308c\u3066\u3057\u307e\u3044\u6e2c\u5b9a\u8aa4\u5dee\u3092\u751f\u3080<\/td><\/tr><tr><td>\u30b5\u30f3\u30d7\u30eb\u8868\u9762\u306e\u53cd\u5c04\u7387\u5909\u5316<\/td><td style=\"background-color:#def5ec\">\u30af\u30ed\u30fc\u30ba\u30c9\u30eb\u30fc\u30d7\u30ec\u30fc\u30b6\u30fc\u8f1d\u5ea6\u5236\u5fa1\u6a5f\u80fd(\u7279\u8a31)\u306b\u3088\u308a\u3001\u8868\u9762\u53cd\u5c04\u7387\u306e\u5909\u5316\u4e2d\u306e\u30b7\u30b0\u30ca\u30eb\u30fb\u30ce\u30a4\u30ba\u6bd4\u306f\u6700\u5927\u3067\u4fdd\u6301\u3055\u308c\u308b<\/td><td style=\"background-color:#fff5d9\">\u8868\u9762\u306e\u53cd\u5c04\u7387\u306e\u5909\u5316\u3067\u30b7\u30b0\u30ca\u30eb\u30fb\u30ce\u30a4\u30ba\u6bd4(S\/N\u6bd4)\u304c\u5909\u5316\u3057\u3066\u3057\u307e\u3046<\/td><td style=\"background-color:#fff5d9\">\u8868\u9762\u306e\u53cd\u5c04\u7387\u306e\u5909\u5316\u3067\u30b7\u30b0\u30ca\u30eb\u30fb\u30ce\u30a4\u30ba\u6bd4(S\/N\u6bd4)\u304c\u5909\u5316\u3057\u3066\u3057\u307e\u3046<\/td><\/tr><\/tbody><\/table>\n<\/div><\/div>\n<\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>\u88fd\u54c1\u60c5\u5831 \u6982\u8981 GaN(LED\u3001\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9)\u306eMOCVD\u6210\u819c\u4e2d\u306ein-situ\u6e2c\u5b9a\u306b\u7279\u5316\u3057\u305f\u88fd\u54c1\u3067\u3059\u3002\u5fc5\u8981\u6a5f\u80fd\u306b\u5fdc\u3058\u3066\u4ee5\u4e0b\u304b\u3089\u9078\u629e\u3067\u304d\u3001\u5f8c\u306b\u30a2\u30c3\u30d7\u30b0\u30ec\u30fc\u30c9\u3059\u308b\u3053\u3068\u3082\u53ef\u80fd\u3067\u3059\u3002 STANDARD HARDWARE LA [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"advgb_blocks_editor_width":"","advgb_blocks_columns_visual_guide":"","footnotes":""},"categories":[6],"tags":[],"manufacturers_tax":[12,19],"class_list":["post-168","post","type-post","status-publish","format-standard","hentry","category-cat05","manufacturers_tax-overseas","manufacturers_tax-mfr-o07"],"acf":[],"author_meta":{"display_name":"rdec","author_link":"https:\/\/rdec.co.jp\/update\/author\/rdec"},"featured_img":null,"coauthors":[],"tax_additional":{"categories":{"linked":["<a href=\"https:\/\/rdec.co.jp\/update\/category\/cat05\" class=\"advgb-post-tax-term\">\u8a08\u6e2c\u7528\u88c5\u7f6e<\/a>"],"unlinked":["<span class=\"advgb-post-tax-term\">\u8a08\u6e2c\u7528\u88c5\u7f6e<\/span>"]}},"comment_count":"0","relative_dates":{"created":"Posted 5\u5e74 ago","modified":"Updated 3\u5e74 ago"},"absolute_dates":{"created":"Posted on 2021\u5e7410\u67088\u65e5","modified":"Updated on 2023\u5e748\u67082\u65e5"},"absolute_dates_time":{"created":"Posted on 2021\u5e7410\u67088\u65e5 6:24 PM","modified":"Updated on 2023\u5e748\u67082\u65e5 2:37 PM"},"featured_img_caption":"","series_order":"","_links":{"self":[{"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/posts\/168","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/comments?post=168"}],"version-history":[{"count":30,"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/posts\/168\/revisions"}],"predecessor-version":[{"id":6022,"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/posts\/168\/revisions\/6022"}],"wp:attachment":[{"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/media?parent=168"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/categories?post=168"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/tags?post=168"},{"taxonomy":"manufacturers_tax","embeddable":true,"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/manufacturers_tax?post=168"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}