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\"\"<\/figure>\n<\/div>\n\n\n\n
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\u88fd\u54c1\u60c5\u5831<\/h4>\n\n\n\n

\u6982\u8981<\/h5>\n\n\n\n

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\u3000\u3055\u3089\u306b\u3001\u30de\u30b0\u30cd\u30c3\u30c8\u30d5\u30a3\u30fc\u30c9\u30b9\u30eb\u30fc\u3001\u30de\u30cb\u30d4\u30e5\u30ec\u30fc\u30bf\u3001XY\u30b9\u30c6\u30fc\u30b8\u306a\u3069Vacstage\u88fd\u54c1\u306e\u771f\u7a7a\u8131\u30ac\u30b9\u51e6\u7406\u3082\u884c\u3046\u3053\u3068\u306b\u3088\u308a\u3001\u3088\u308a\u826f\u597d\u306a\u771f\u7a7a\u5b9f\u9a13\u74b0\u5883\u3092\u3054\u63d0\u4f9b\u3057\u307e\u3059\u3002\u5230\u9054\u771f\u7a7a\u5ea6E-9<\/sup>Pa\uff5eE-10<\/sup>Pa\u53f0\u3092\u8981\u6c42\u3055\u308c\u308b\u30c1\u30a7\u30f3\u30d0\u30fc\u306b\u306f\u3001\u7acb\u4e0a\u6642\u306e\u30d9\u30fc\u30af\u6e29\u5ea6\u306e\u4f4e\u4e0b\u3084\u6642\u9593\u306e\u77ed\u7e2e\u304c\u3067\u304d\u3001XHV\u30fbUHV\u30c1\u30a7\u30f3\u30d0\u30fc\u306b\u306f\u6700\u9069\u306a\u51e6\u7406\u3068\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n

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\u51e6\u7406\u524d<\/figcaption><\/figure>\n<\/div>\n\n\n\n
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\u51e6\u7406\u5f8c<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n
\u771f\u7a7a\u30d9\u30fc\u30af\u7089\u4ed5\u69d8<\/h5>\n\n\n\n
\u6709\u52b9\u5bf8\u6cd5<\/td>W750xD1250xH750(mm)\u4ee5\u4e0b<\/td><\/tr>
\u30d9\u30fc\u30af\u51e6\u7406\u6e29\u5ea6<\/td>\u2266450\u2103\uff08\u6eb6\u63a5\u30d9\u30ed\u30fc\u30ba\u88fd\u54c1\u2266250\u2103\uff09<\/td><\/tr>
\u52a0\u71b1\u6642\u9593<\/td>450\u2103\uff0d10\u6642\u9593 \uff5e24\u6642\u9593(\u30aa\u30d7\u30b7\u30e7\u30f3)<\/td><\/tr>
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\u51b7\u5374\u65b9\u5f0f<\/td>\u81ea\u7136\u51b7\u5374<\/td><\/tr>
\u30d1\u30fc\u30b8\u30ac\u30b9<\/td>Ar\uff08\u30a2\u30eb\u30b4\u30f3\uff09<\/td><\/tr>
\u5230\u9054\u5727\u529b
\u52a0\u71b1\u51e6\u7406\u4e2d\u306e\u5727\u529b<\/td>		10-7<\/sup>Pa\u53f0
5.0×10-5<\/sup>Pa\u4ee5\u4e0b<\/td><\/tr>
\u6392\u6c17\u7cfb<\/td>\u30bf\u30fc\u30dc\u5206\u5b50\u30dd\u30f3\u30d7\uff083200L\uff0fsec\uff09
\u30eb\u30fc\u30c4\u30c9\u30e9\u30a4\u30dd\u30f3\u30d7\uff081000L\uff0fmin\uff09<\/td><\/tr><\/tbody><\/table>\n\n\n\n
<\/h6>\n\n\n\n
\u88c5\u7f6e\u6982\u8981\uff08DA0147\uff09<\/strong><\/h5>\n\n\n\n
\u30c1\u30a7\u30f3\u30d0\u30fc\u5bb9\u7a4d<\/td>\u7d048L<\/td><\/tr>
\u6392\u6c17\u7cfb<\/td>(SUS316\u3000\u8907\u5408\u96fb\u89e3\u7814\u78e8\uff0b450\u2103\/10\uff48\u771f\u7a7a\u8131\u30ac\u30b9\u51e6\u7406)
300 L\/sec(TMP\u30dd\u30f3\u30d7)\uff0b 90L\/min(\u30b9\u30af\u30ed\u30fc\u30eb\u30dd\u30f3\u30d7)
100L\/sec (\u30a4\u30aa\u30f3\u30dd\u30f3\u30d7)\uff0b 2000L\/sec(\u30b2\u30c3\u30bf\u30fc\u30dd\u30f3\u30d7)<\/td><\/tr>
\u30d9\u30fc\u30ad\u30f3\u30b0<\/td>150\uff5e220\u2103\uff0872\u6642\u9593\uff09<\/td><\/tr>
\u5230\u9054\u5727\u529b<\/td>6.6×10-10<\/sup>Pa<\/strong><\/strong>\uff08\u30a4\u30aa\u30f3\u30dd\u30f3\u30d7+\u30b2\u30c3\u30bf\u30fc\u30dd\u30f3\u30d7\u6392\u6c17\uff09<\/td><\/tr>
\u6b8b\u7559\u30ac\u30b9<\/td>\"\"<\/td><\/tr><\/tbody><\/table>\n\n\n\n

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