{"id":70,"date":"2021-10-08T17:48:39","date_gmt":"2021-10-08T08:48:39","guid":{"rendered":"http:\/\/rdec.co.jp\/update\/?p=70"},"modified":"2023-05-08T16:39:00","modified_gmt":"2023-05-08T07:39:00","slug":"n2%e3%83%97%e3%83%a9%e3%82%ba%e3%83%9e%e3%82%bd%e3%83%bc%e3%82%b9","status":"publish","type":"post","link":"https:\/\/rdec.co.jp\/update\/70","title":{"rendered":"\u7a92\u7d20\u30d7\u30e9\u30ba\u30de\u30bd\u30fc\u30b9"},"content":{"rendered":"\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<p><a rel=\"noreferrer noopener\" href=\"\/data\/products\/veeco.pdf\" target=\"_blank\">\u5468\u671f\u8868\u30fb\u84b8\u7740\u6750\u6599\u304b\u3089\u9078\u3076 <i class=\"far fa-file-pdf\"><\/i><\/a><\/p>\n\n\n\n<figure class=\"wp-block-image is-resized\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/1-7402.jpg\" alt=\"\u753b\u50cf\u306b alt \u5c5e\u6027\u304c\u6307\u5b9a\u3055\u308c\u3066\u3044\u307e\u305b\u3093\u3002\u30d5\u30a1\u30a4\u30eb\u540d: 1-7402.jpg\" width=\"302\" height=\"243\"\/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-full advgb-dyn-7b84fbc1\"><img loading=\"lazy\" decoding=\"async\" width=\"230\" height=\"166\" src=\"https:\/\/rdec.co.jp\/update\/wp-content\/uploads\/2021\/10\/N2.jpg\" alt=\"\" class=\"wp-image-611\"\/><figcaption class=\"wp-element-caption\">Nitrogen optical emission spectrum of the Veeco UNI-Bulb RF Plasma Source. Data courtesy of J.F. Schetzina, North Carolina State University.<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n<h4 class=\"wp-block-heading advgb-dyn-f4f5d08d\">\u88fd\u54c1\u60c5\u5831<\/h4>\n\n\n\n<h5 class=\"wp-block-heading advgb-dyn-a85fd84e\"><strong>\u7279\u9577<\/strong><\/h5>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u4e00\u4f53\u578bPBN\u30a4\u30f3\u30ec\u30c3\u30c8\u30c1\u30e5\u30fc\u30d6\u3092\u4f7f\u7528\u3057\u3066\u304a\u308a\u307e\u3059\u3002<\/li>\n\n\n\n<li>\u30d3\u30fc\u30e0\u4e2d\u306e\u30a4\u30aa\u30f3\u306f\u50c5\u304b\u3067\u3059\u3002<\/li>\n\n\n\n<li>GaN, \u7a92\u5316\u5316\u5408\u7269, N\u30c9\u30fc\u30d4\u30f3\u30b0\u6210\u9577\u306b\u6700\u9069\u3067\u3059\u3002<\/li>\n\n\n\n<li>H<sub>2<\/sub>\u306b\u3082\u5bfe\u5fdc\u53ef\u80fd\u3067\u3059\u3002<\/li>\n<\/ul>\n\n\n\n<h5 class=\"wp-block-heading advgb-dyn-caa1f53c\">\u5bfe\u8c61\u6750\u6599<\/h5>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><tbody><tr><td>N<sub>2<\/sub><\/td><td>H<sub>2<\/sub><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<h5 class=\"wp-block-heading advgb-dyn-a5e4a391\">\u4ed5\u69d8<\/h5>\n\n\n\n<table class=\"wp-block-advgb-table advgb-table-frontend\"><tbody><tr><td style=\"background-color:#ececec;text-align:center\" colspan=\"2\">MBE\u88c5\u7f6e<\/td><td style=\"text-align:center\">\u5168\u3066\u306e\u7814\u7a76\u7528\u30fb\u751f\u7523\u7528\u88c5\u7f6e\u306b\u4f7f\u7528\u53ef\u80fd<\/td><\/tr><tr><td style=\"background-color:#ececec;text-align:center\" colspan=\"2\">\u4f9b\u7d66\u30ac\u30b9<\/td><td style=\"text-align:center\">N<sub>2<\/sub>\u3001H<sub>2<\/sub><\/td><\/tr><tr><td style=\"background-color:#ececec;text-align:center\" colspan=\"2\">\u6700\u5c0f\u53d6\u4ed8\u30d5\u30e9\u30f3\u30b8<\/td><td style=\"text-align:center\">ICF114 \uff084.5\u30a4\u30f3\u30c1\uff09<\/td><\/tr><tr><td style=\"background-color:#ececec;text-align:center\" colspan=\"2\">\u771f\u7a7a\u5185\u9577\u3055\/\u76f4\u5f84<\/td><td style=\"text-align:center\">318mm\uff0812.5\u30a4\u30f3\u30c1\uff09\/ 54\uff4d\uff4d\uff082.125\u30a4\u30f3\u30c1\uff09<\/td><\/tr><tr><td style=\"background-color:#ececec;text-align:center\" colspan=\"2\">\u5916\u5f84\u5bf8\u6cd5\u56f3<\/td><td style=\"text-align:center\">\u3054\u76f8\u8ac7\u4e0b\u3055\u3044<\/td><\/tr><tr><td style=\"background-color:#ececec;text-align:center\" colspan=\"2\">\u4f9b\u7d66\u30ac\u30b9\u63a5\u7d9a\u53e3<\/td><td style=\"text-align:center\">ICF34 \uff081.33\u30a4\u30f3\u30c1\uff09\u30002\u30f6\u6240<\/td><\/tr><tr><td style=\"background-color:#ececec;text-align:center\" colspan=\"2\">\u30d7\u30e9\u30ba\u30de\u30d0\u30eb\u30d6<\/td><td style=\"text-align:center\">\u7121\u9178\u7d20\u3001\u5168PBN\u30d7\u30e9\u30ba\u30de\u653e\u96fb\u5bb9\u5668\u30fb\u4ea4\u63db\u53ef\u80fd\u30a2\u30d1\u30fc\u30c1\u30e3\u30fc\u30d7\u30ec\u30fc\u30c8<\/td><\/tr><tr><td style=\"background-color:#ececec;text-align:center\" colspan=\"2\">\u30a2\u30d1\u30fc\u30c1\u30e3\u30fc\u30d7\u30ec\u30fc\u30c8<\/td><td style=\"text-align:center\">\u4ea4\u63db\u53ef\u80fd\u306a\u30a2\u30d1\u30fc\u30c1\u30e3\u30fc\u30d7\u30ec\u30fc\u30c8\u306fC\u30ea\u30f3\u30b0\u306b\u3066\u56fa\u5b9a<br>\u30a2\u30d1\u30fc\u30c1\u30e3\u30fc\u30d7\u30ec\u30fc\u30c8\u306f\u7a74\u306e\u914d\u7f6e\u3068\u5fdc\u7528\u304c\u6700\u5927\u9650\u5229\u7528\u53ef\u80fd<br>\uff08\u5927\u304d\u306a\u6210\u9577\u3001\u5c0f\u3055\u3044\u6210\u9577\u3001\u30c9\u30fc\u30d4\u30f3\u30b0\u7b49\uff09<br>\uff08\u304a\u5ba2\u69d8\u306e\u30c1\u30e3\u30f3\u30d0\u30fc\u4ed5\u69d8\u306b\u5408\u308f\u305b\u3066\u30ab\u30b9\u30bf\u30e0\u8a2d\u8a08\uff09<\/td><\/tr><tr><td style=\"background-color:#ececec;text-align:center\" colspan=\"2\">\u52a0\u71b1<\/td><td style=\"text-align:center\">\u8a98\u5c0e\u9023\u7d50\u5f0f<\/td><\/tr><tr><td style=\"background-color:#ececec;text-align:center\" colspan=\"2\">\u6c34\u51b7<\/td><td style=\"text-align:center\">RF\u30b3\u30a4\u30eb\u30fb\u30d1\u30ef\u30fc\u30d5\u30a3\u30fc\u30c9\u30b9\u30eb\u30fc 350mL\/min\uff0840psi\uff09<\/td><\/tr><tr><td style=\"background-color:#ececec;text-align:center\" colspan=\"2\">\u30a4\u30aa\u30f3\u30c7\u30a3\u30d5\u30ec\u30af\u30bf\u30d7\u30ec\u30fc\u30c8<\/td><td style=\"text-align:center\">\u30aa\u30d7\u30b7\u30e7\u30f3<\/td><\/tr><tr><td style=\"background-color:#ececec;text-align:center\" colspan=\"2\">\u96fb\u6e90<\/td><td style=\"text-align:center\">600W\u3000RF\uff0813.56MHz)\u30017m\u30b1\u30fc\u30d6\u30eb<\/td><\/tr><tr><td style=\"background-color:#ececec;text-align:center\" rowspan=\"2\">\u30aa\u30fc\u30c8\u30c1\u30e5\u30fc\u30ca\u30fc<\/td><td style=\"background-color:#ececec;text-align:center\">\u30e6\u30cb\u30c3\u30c8<\/td><td style=\"text-align:center\">203W \u00d7 102H \u00d7 305D<\/td><\/tr><tr><td style=\"background-color:#ececec;text-align:center\">\u30b3\u30f3\u30c8\u30ed\u30fc\u30e9<\/td><td style=\"text-align:center\">241W \u00d7 88H \u00d7 331D<\/td><\/tr><\/tbody><\/table>\n","protected":false},"excerpt":{"rendered":"<p>\u5468\u671f\u8868\u30fb\u84b8\u7740\u6750\u6599\u304b\u3089\u9078\u3076 \u88fd\u54c1\u60c5\u5831 \u7279\u9577 \u5bfe\u8c61\u6750\u6599 N2 H2 \u4ed5\u69d8<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"advgb_blocks_editor_width":"","advgb_blocks_columns_visual_guide":"","footnotes":""},"categories":[2,68],"tags":[],"manufacturers_tax":[12,18],"class_list":["post-70","post","type-post","status-publish","format-standard","hentry","category-cat01","category-cat01_02","manufacturers_tax-overseas","manufacturers_tax-mfr-o06"],"acf":[],"author_meta":{"display_name":"rdec","author_link":"https:\/\/rdec.co.jp\/update\/author\/rdec"},"featured_img":null,"coauthors":[],"tax_additional":{"categories":{"linked":["<a href=\"https:\/\/rdec.co.jp\/update\/category\/cat01\" class=\"advgb-post-tax-term\">\u84b8\u7740\u88c5\u7f6e\u30fbMBE\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/a>","<a href=\"https:\/\/rdec.co.jp\/update\/category\/cat01\/cat01_02\" class=\"advgb-post-tax-term\">MBE\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/a>"],"unlinked":["<span class=\"advgb-post-tax-term\">\u84b8\u7740\u88c5\u7f6e\u30fbMBE\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/span>","<span class=\"advgb-post-tax-term\">MBE\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/span>"]}},"comment_count":"0","relative_dates":{"created":"Posted 5\u5e74 ago","modified":"Updated 3\u5e74 ago"},"absolute_dates":{"created":"Posted on 2021\u5e7410\u67088\u65e5","modified":"Updated on 2023\u5e745\u67088\u65e5"},"absolute_dates_time":{"created":"Posted on 2021\u5e7410\u67088\u65e5 5:48 PM","modified":"Updated on 2023\u5e745\u67088\u65e5 4:39 PM"},"featured_img_caption":"","series_order":"","_links":{"self":[{"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/posts\/70","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/comments?post=70"}],"version-history":[{"count":34,"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/posts\/70\/revisions"}],"predecessor-version":[{"id":5987,"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/posts\/70\/revisions\/5987"}],"wp:attachment":[{"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/media?parent=70"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/categories?post=70"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/tags?post=70"},{"taxonomy":"manufacturers_tax","embeddable":true,"href":"https:\/\/rdec.co.jp\/update\/wp-json\/wp\/v2\/manufacturers_tax?post=70"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}