Vacstage
Product Information
The”Vacstage” Series, designed, developed and manufactured by AVC Co., Ltd. in order to meet customers’ various requirements, allows users to manipulate samples and locate them precisely in ultra high vacuum (UHV) environment.
Special specification is also available mostly for the low-priced products. We would be pleased to make full use of our experience and help customer’s installation and extension of the existing system.
Please feel free to contact us.
LINEAR MOTION Z STAGE (ALMS 275 SERIES)
| Allowable Leak Rate | 1.33 x 10-11 Pa·m3/sec Maximum |
| Vacuum Sealing Method | Welded Bellows |
| Allowable Heating Temperature | 200 degrees C Maximum |
| Connect Flange | ICF70 /ICF114 |
| Travel Flange | ICF70 |
| Travel | Z=50 mm /100 mm |
| Travel Resolution | Z=0.1 mm |
LINEAR MOTION Z STAGE (ALMS 275 SERIES)
| Allowable Leak Rate | 1.33 x 10-11 Pa·m3/sec Maximum |
| Vacuum Sealing Method | Welded Bellows |
| Allowable Heating Temperature | 200 degrees C Maximum |
| Connect Flange | ICF70 |
| Travel Flange | ICF70 |
| Travel | Z=50 mm /100 /150 /200 mm |
| Travel Resolution | Z=0.5 mm |
LINEAR MOTION Z STAGE (ALMS 275 SERIES)
| Allowable Leak Rate | 1.33 x 10-11 Pa·m3/sec Maximum |
| Vacuum Sealing Method | Welded Bellows |
| Allowable Heating Temperature | 200 degrees C Maximum |
| Connect Flange | ICF114 |
| Travel | Z=50 mm /100 /150 /200 /300 mm |
| Travel Resolution | Z=0.5 mm |
3-AXIS MANIPULATOR (AMP SERIES)
| Allowable Leak Rate | 1.33 x 10-11 Pa·m3/sec Maximum |
| Vacuum Sealing Method | Welded Bellows |
| Allowable Heating Temperature | 200 degrees C Maximum |
| Connect Flange | ICF203 /ICF152 /ICF114 |
| Travel Flange | ICF70 |
| Travel | XY=+/-12.5 mm Travel Resolution: 0.01 mm, 0.005 mm Z=+/-12.5 mm Travel Resolution: 0.5 mm, 0.005 mm |
| Conductive Port | ICFφ203=ICFφ34 × 5 ICFφ152=ICFφ34 × 4 |
LARGE GAUGE 3-AXIS MANIPULATOR (ALF 3 SERIES)
| Allowable Leak Rate | 1.33 x 10-11 Pa·m3/sec Maximum |
| Vacuum Sealing Method | Welded Bellows |
| Allowable Heating Temperature | 200 degrees C Maximum |
| Connect Flange | ICF203 |
| Travel Flange | ICF203 /ICF152 |
| Travel | XY=+/-12.5 mm Travel Resolution: 0.005 mm Z=50 /100 /150 /250 /300 mm Travel Resolution: 0.5 mm, 0.005 mm |
XY STAGE (AXY SERIES)
| Allowable Leak Rate | 1.33 x 10-11 Pa·m3/sec Maximum |
| Vacuum Sealing Method | Welded Bellows |
| Allowable Heating Temperature | 200 degrees C Maximum |
| Connect Flange | ICF70 /ICF114 /ICF152 /ICF203 |
| Travel Flange | ICF70 /ICF114 |
| X, Y Travel | XY=+/-12.5 mm Travel Resolution: 0.01 mm, 0.005 mm |
TILT STAGE (ATS SERIES)
| Allowable Leak Rate | 1.33 x 10-11 Pa·m3/sec Maximum |
| Vacuum Sealing Method | Welded Bellows |
| Allowable Heating Temperature | 200 degrees C Maximum |
| Connect Flange | ICF70 /ICF114 |
| Travel Flange | ICF70 /ICF114 |
| Angle | +/-5 degrees |
MAGNET FEEDTHROUGH (AMF SERIES)
| Allowable Leak Rate | 1.33 x 10-11 Pa·m3/sec Maximum |
| Drive Method | Magnet Coupling |
| Straight Power | 60N |
| Rotation Torque | 0.8N · m |
| Allowable Heating Temperature | 200 degrees C Maximum |
| Connect Flange | ICF70 /ICF114 |
| Travel Flange | ICF70 |
| Axis Travel Diameter | φ10 |
| Stroke | 400 /500 /300 /700 /800 /900 /1000 mm |
2-AXIS ROTARY MAGNET FEEDTHROUGH (AMFW SERIES)
| Allowable Leak Rate | 1.33 x 10-11 Pa·m3/sec Maximum |
| Drive Method | Magnet Coupling |
| Straight Power | 60N |
| Rotation Torque | 0.8N · m (First and Second axis) |
| Allowable Heating Temperature | 200 degrees C Maximum |
| Connect Flange | ICF70 /ICF114 |
| Travel Flange | ICF70 |
| Axis Travel Diameter | First axis: φ10 Second axis: φ10 |
| Stroke | 400 /500 /300 /700 /800 /900 /1000 mm |
