Edge-RHEED
High Pressure Reflection High-Energy Electron Diffraction
Product Information
We have developed the Edge-RHEED, which can be used at 1 Pa or higher deposition pressures, such as PLD and laser MBE.
Features of Two-Stage Differentially Pumped Electron Gun
- Operation up to 100 Pa is possible.
- Angle adjustment (tilt) function included
- Magnetic shield included as standard equipment
- Gate valve included as a standard accessory
- Dry pump unit is optional.
- Mounting support stand included (design can be customized)
Features of Movable Screen
- ICF152 mounting flange
- Viewport
- Manual rotating screen shutter preventing deposition
- Light shielding cover structure
- Linear motion feedthrough. Moving distance 50 mm.
Drawings
Mounting image
Specifications
Electron Gun
| Model Number | RDA-201G |
| Insulation Voltage | DC 30 kV |
| Beam Spot Dia. | Φ90 μm (min.) |
| Filament | Tungsten hairpin |
| Wehnelt Electrode | Variable bias |
| Focusing Lens | Coreless magnetic lens |
| Deflection Lens | Toroidal electromagnetic lens |
| Beam Deflection | X： +/- 2°, Y：+/- 4°（Manual） |
| Magnetic Shield | Standard feature (Electron gun only) |
| Working Pressure | < 100 Pa |
| Differential Pumping | Two-stage: Filament section, Nozzle section |
| Max. Bake Temperature | 200 ℃ |
| Mounting Flange | ICF114-FH |
| Exhaust Port Flange | ICF70-FH |
| Size | Φ192 mm × 160 mm × 703 mm |
Screen for Edge-RHEED
| Model Number | ASHP-6 |
| Mounting Flange | ICF152-FH |
| Viewport | 7056 Glass |
| Screen View Dia. | Φ38 mm (Lead glass) |
| Screen Phosphor | P31 |
| Manual Linear Motion Mechanism | Moving distance: 50 mm |
| Screen Shutter | Manual rotation type |
Power Supply for Edge-RHEED
| Model Number | RDA-006P |