RHEED
Reflection High-Energy Electron Diffration
Product Information
RHEED is well known as the in-situ metrology tool for the development of cutting edge semiconductor technologies, particularly, compound semiconductor used for next-generation power devices or optical devices. R-DEC has been delivering RHEED systems to various research institutes and universities not only in Japan but also overseas. This all-new RHEED system was developed and manufactured completely within R-DEC to fulfill the researchers’ needs.
Features of Electron Gun
- Extremely Bright Beam Spot
- Magnetic Shield
- Safety interlock Feature
- RoHS-Compliant
Features of Power Supply
- Enhanced Stability
- Parameter Memory/Recall
All the parameters* will be displayed on the LCD screen on the remote control. Furthermore, it allows the user to store hundred different parameter settings. Once the user finds the optimized parameters, the parameters can be stored for later recall.
* Acceleration voltage, filament current, bias voltage, beam deflection (X / Y), focus (Z).
- Beam Blanking
Drawings
Specifications
Electron Gun
| Model Number | RDA-005G |
| Insulation Voltage | DC 30 kV |
| Beam Spot Size | Φ90 μm (min.) |
| Filament | Tungsten hairpin |
| Wehnelt | Variable bias |
| Focus Lens | Coreless magnetic lens |
| Deflection Lens | Toroidal electromagnetic lens |
| Beam Deflection | X/Y: ±8° |
| Magnetic Shield | Standard feature |
| Working Pressure | < 1 × 10-3 Pa Differential Pumping type <1 Pa*) |
| Max. Bakeout Temperature | 200 ℃ |
| Mounting Flange | ICF70-FH |
| Dimensions | Φ100 mm × 335 mm （455 mm including connector） |
*Option：RDA-005G-DP
Power Supply
| Model Number | RDA-006P |
| Acceleration Voltage | -3 to -30 kV (Ripple: 15 V p-p) |
| Emission Current | 80 μA (max.) |
| Filament Voltage | 0 to +2 V, Max. 1.9 A |
| Bias power Supply | 0 to 480 V Variable (Ripple: 5 m V p-p) |
| Remote Controller (Programmable) | LCD Digital indicator: high voltage, emission current, filament current bias voltage, beam deflection(X/Y), focus (Z) |
| Interlock | High voltage interlock |
| Cables | 5 m high voltage cable, 7 m remote controller cable |
| External I/O | Analog, Digital (kSA 400-gun control capable) |
| Input Power | AC 100 V to 240V (Universal Power Supply) |
| Dimensions | 4U rack (EIA 177 mm x W 482.5 mm x D450 mm) |
| Others | RoHS-Compliant |
kSA400 World’s premier analytical RHEED system
kSA400 is compatible with R-DEC RHEED system.
Features of kSA400
- Fully integrated, state of the art CCD camera
- RHEED Image Library (RIL)
- Full I/O compatibility
- Flexible, light-tight RHEED screen flange mounts
- Ongoing software development
- Extensive algorithms for real- time and quantitative analysis
Growth rate, Lattice spacing, Strain evolution, Coherence length and surface evolution, Reconstruction evolution, Surface structure - Full movie acquisition and playback